A mode-localized DC electric field sensor

Yongcun Hao; Chenggang Wang; Zheng Sun; Zhao Zhang; Jin Guo; Honglong Chang

doi:10.1016/j.sna.2021.113244

A mode-localized DC electric field sensor

Yongcun Hao
, Chenggang Wang
, Zheng Sun
, Zhao Zhang
, Jin Guo
, Honglong Chang

School of Mechanical Engineering

Northwestern Polytechnical University Xian

Research output: Contribution to journal › Article › peer-review

23 Scopus citations

Abstract

This paper reports a DC electric field sensor (EFS) based on the mode localization phenomenon. The EFS consists of 3-degrees-of-freedom weakly coupled resonators (WCRs) and two capacitor arrays that are electrostatically coupled with the WCRs. The capacitor arrays sense the electric field and produce a stiffness perturbation that causes an amplitude ratio change of the WCRs. The EFS is fabricated using a silicon-on-insulator process and evaluated in a vacuum chamber. The amplitude ratio of the resonators changes from 2.2 to 7.5 as the electric field strength ranges from 0 to 7 kV/m, with a sensitivity of 0.76 /(kV/m). The noise, resolution, and stability of the mode-localized EFS are 11.5 (V/m)/√Hz, 22.9 V/m, and 9.1 V/m, respectively, which are competitive compared with that of other high-performance micromachined EFS.

Original language	English
Article number	113244
Journal	Sensors and Actuators, A: Physical
Volume	333
DOIs	https://doi.org/10.1016/j.sna.2021.113244
State	Published - 1 Jan 2022

Keywords

Amplitude ratio
Electric field sensor
Mode localization
Weakly coupled resonators

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10.1016/j.sna.2021.113244

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title = "A mode-localized DC electric field sensor",

abstract = "This paper reports a DC electric field sensor (EFS) based on the mode localization phenomenon. The EFS consists of 3-degrees-of-freedom weakly coupled resonators (WCRs) and two capacitor arrays that are electrostatically coupled with the WCRs. The capacitor arrays sense the electric field and produce a stiffness perturbation that causes an amplitude ratio change of the WCRs. The EFS is fabricated using a silicon-on-insulator process and evaluated in a vacuum chamber. The amplitude ratio of the resonators changes from 2.2 to 7.5 as the electric field strength ranges from 0 to 7 kV/m, with a sensitivity of 0.76 /(kV/m). The noise, resolution, and stability of the mode-localized EFS are 11.5 (V/m)/√Hz, 22.9 V/m, and 9.1 V/m, respectively, which are competitive compared with that of other high-performance micromachined EFS.",

keywords = "Amplitude ratio, Electric field sensor, Mode localization, Weakly coupled resonators",

author = "Yongcun Hao and Chenggang Wang and Zheng Sun and Zhao Zhang and Jin Guo and Honglong Chang",

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doi = "10.1016/j.sna.2021.113244",

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T1 - A mode-localized DC electric field sensor

AU - Hao, Yongcun

AU - Wang, Chenggang

AU - Sun, Zheng

AU - Zhang, Zhao

AU - Guo, Jin

AU - Chang, Honglong

PY - 2022/1/1

Y1 - 2022/1/1

N2 - This paper reports a DC electric field sensor (EFS) based on the mode localization phenomenon. The EFS consists of 3-degrees-of-freedom weakly coupled resonators (WCRs) and two capacitor arrays that are electrostatically coupled with the WCRs. The capacitor arrays sense the electric field and produce a stiffness perturbation that causes an amplitude ratio change of the WCRs. The EFS is fabricated using a silicon-on-insulator process and evaluated in a vacuum chamber. The amplitude ratio of the resonators changes from 2.2 to 7.5 as the electric field strength ranges from 0 to 7 kV/m, with a sensitivity of 0.76 /(kV/m). The noise, resolution, and stability of the mode-localized EFS are 11.5 (V/m)/√Hz, 22.9 V/m, and 9.1 V/m, respectively, which are competitive compared with that of other high-performance micromachined EFS.

AB - This paper reports a DC electric field sensor (EFS) based on the mode localization phenomenon. The EFS consists of 3-degrees-of-freedom weakly coupled resonators (WCRs) and two capacitor arrays that are electrostatically coupled with the WCRs. The capacitor arrays sense the electric field and produce a stiffness perturbation that causes an amplitude ratio change of the WCRs. The EFS is fabricated using a silicon-on-insulator process and evaluated in a vacuum chamber. The amplitude ratio of the resonators changes from 2.2 to 7.5 as the electric field strength ranges from 0 to 7 kV/m, with a sensitivity of 0.76 /(kV/m). The noise, resolution, and stability of the mode-localized EFS are 11.5 (V/m)/√Hz, 22.9 V/m, and 9.1 V/m, respectively, which are competitive compared with that of other high-performance micromachined EFS.

KW - Amplitude ratio

KW - Electric field sensor

KW - Mode localization

KW - Weakly coupled resonators

UR - https://www.scopus.com/pages/publications/85121000175

U2 - 10.1016/j.sna.2021.113244

DO - 10.1016/j.sna.2021.113244

M3 - 文章

AN - SCOPUS:85121000175

SN - 0924-4247

VL - 333

JO - Sensors and Actuators, A: Physical

JF - Sensors and Actuators, A: Physical

M1 - 113244

ER -

A mode-localized DC electric field sensor

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Keywords

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