A mode-localized accelerometer based on four degree-of-freedom weakly coupled resonators

Hao Kang; Jing Yang; Honglong Chang

doi:10.1109/MEMSYS.2018.8346717

A mode-localized accelerometer based on four degree-of-freedom weakly coupled resonators

Hao Kang, Jing Yang, Honglong Chang

School of Mechanical Engineering

Northwestern Polytechnical University Xian

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

23 Scopus citations

Abstract

This paper for the first time reports a micromachined mode-localized accelerometer based on a four degree-of-freedom (DoF) weakly coupled resonators (WCRs). With increasing number of DoFs, both sensitivity and resolution obtained a huge improvement. The open-loop experimental results show that the sensitivity based on amplitude ratio (36.86/g) and resolution (54.31 μg) are improved by 838% and 935% respectively compared with the state-of-the-art 3-DoF mode-localized accelerometer (4.4/g, 508 μg) under the same test circumstances. It can be concluded that the 4-DoF system is effective in greatly improving the sensitivity and resolution of mode-localized sensor.

Original language	English
Title of host publication	2018 IEEE Micro Electro Mechanical Systems, MEMS 2018
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	960-963
Number of pages	4
ISBN (Electronic)	9781538647820
DOIs	https://doi.org/10.1109/MEMSYS.2018.8346717
State	Published - 24 Apr 2018
Event	31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018 - Belfast, United Kingdom Duration: 21 Jan 2018 → 25 Jan 2018

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Volume	2018-January
ISSN (Print)	1084-6999

Conference

Conference	31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018
Country/Territory	United Kingdom
City	Belfast
Period	21/01/18 → 25/01/18

Access to Document

10.1109/MEMSYS.2018.8346717

Cite this

Kang, H., Yang, J., & Chang, H. (2018). A mode-localized accelerometer based on four degree-of-freedom weakly coupled resonators. In 2018 IEEE Micro Electro Mechanical Systems, MEMS 2018 (pp. 960-963). (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2018-January). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMSYS.2018.8346717

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title = "A mode-localized accelerometer based on four degree-of-freedom weakly coupled resonators",

abstract = "This paper for the first time reports a micromachined mode-localized accelerometer based on a four degree-of-freedom (DoF) weakly coupled resonators (WCRs). With increasing number of DoFs, both sensitivity and resolution obtained a huge improvement. The open-loop experimental results show that the sensitivity based on amplitude ratio (36.86/g) and resolution (54.31 μg) are improved by 838% and 935% respectively compared with the state-of-the-art 3-DoF mode-localized accelerometer (4.4/g, 508 μg) under the same test circumstances. It can be concluded that the 4-DoF system is effective in greatly improving the sensitivity and resolution of mode-localized sensor.",

author = "Hao Kang and Jing Yang and Honglong Chang",

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Kang, H, Yang, J & Chang, H 2018, A mode-localized accelerometer based on four degree-of-freedom weakly coupled resonators. in 2018 IEEE Micro Electro Mechanical Systems, MEMS 2018. Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), vol. 2018-January, Institute of Electrical and Electronics Engineers Inc., pp. 960-963, 31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018, Belfast, United Kingdom, 21/01/18. https://doi.org/10.1109/MEMSYS.2018.8346717

A mode-localized accelerometer based on four degree-of-freedom weakly coupled resonators. / Kang, Hao; Yang, Jing; Chang, Honglong.
2018 IEEE Micro Electro Mechanical Systems, MEMS 2018. Institute of Electrical and Electronics Engineers Inc., 2018. p. 960-963 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2018-January).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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N2 - This paper for the first time reports a micromachined mode-localized accelerometer based on a four degree-of-freedom (DoF) weakly coupled resonators (WCRs). With increasing number of DoFs, both sensitivity and resolution obtained a huge improvement. The open-loop experimental results show that the sensitivity based on amplitude ratio (36.86/g) and resolution (54.31 μg) are improved by 838% and 935% respectively compared with the state-of-the-art 3-DoF mode-localized accelerometer (4.4/g, 508 μg) under the same test circumstances. It can be concluded that the 4-DoF system is effective in greatly improving the sensitivity and resolution of mode-localized sensor.

AB - This paper for the first time reports a micromachined mode-localized accelerometer based on a four degree-of-freedom (DoF) weakly coupled resonators (WCRs). With increasing number of DoFs, both sensitivity and resolution obtained a huge improvement. The open-loop experimental results show that the sensitivity based on amplitude ratio (36.86/g) and resolution (54.31 μg) are improved by 838% and 935% respectively compared with the state-of-the-art 3-DoF mode-localized accelerometer (4.4/g, 508 μg) under the same test circumstances. It can be concluded that the 4-DoF system is effective in greatly improving the sensitivity and resolution of mode-localized sensor.

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Kang H, Yang J, Chang H. A mode-localized accelerometer based on four degree-of-freedom weakly coupled resonators. In 2018 IEEE Micro Electro Mechanical Systems, MEMS 2018. Institute of Electrical and Electronics Engineers Inc. 2018. p. 960-963. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). doi: 10.1109/MEMSYS.2018.8346717

A mode-localized accelerometer based on four degree-of-freedom weakly coupled resonators

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