A Miniature Spot Position Detector Based on a Resonant Calorimeter for the Micro-Sized Spot

Aojie Quan; Chen Wang; Hemin Zhang; Yangyang Guan; Chengxin Li; Chenxi Wang; Michael Kraft

doi:10.1109/MEMS58180.2024.10439469

A Miniature Spot Position Detector Based on a Resonant Calorimeter for the Micro-Sized Spot

Aojie Quan
, Chen Wang
, Hemin Zhang
, Yangyang Guan
, Chengxin Li
, Chenxi Wang
, Michael Kraft

School of Mechanical Engineering

KU Leuven

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

1 Scopus citations

Abstract

In this study, we introduce an innovative method for continuously tracking the positions of small laser spots using a resonant calorimeter. The detectable heat generated by the laser spot varies with its distribution on the proposed device. We first analyze the device's sensitivity with varying structural parameters using finite element analysis (FEA) and subsequently fabricate and measure the optimized design. Our findings indicate that the resonant frequency of the calorimeter exhibits a linear relationship with the 2 μm-sized laser spot position along with the resonator beam, covering a range from 0 to 100 μm. Remarkably, we achieve an impressive spot position noise floor as low as 2 nm/√Hz, within a 95 dB dynamic range.

Original language	English
Title of host publication	IEEE 37th International Conference on Micro Electro Mechanical Systems, MEMS 2024
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	987-990
Number of pages	4
ISBN (Electronic)	9798350357929
DOIs	https://doi.org/10.1109/MEMS58180.2024.10439469
State	Published - 2024
Event	37th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2024 - Austin, United States Duration: 21 Jan 2024 → 25 Jan 2024

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)	1084-6999

Conference

Conference	37th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2024
Country/Territory	United States
City	Austin
Period	21/01/24 → 25/01/24

Keywords

Laser spot position detection
low noise
self-oscillation
sensitivity optimization

Access to Document

10.1109/MEMS58180.2024.10439469

Cite this

Quan, A., Wang, C., Zhang, H., Guan, Y., Li, C., Wang, C., & Kraft, M. (2024). A Miniature Spot Position Detector Based on a Resonant Calorimeter for the Micro-Sized Spot. In IEEE 37th International Conference on Micro Electro Mechanical Systems, MEMS 2024 (pp. 987-990). (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMS58180.2024.10439469

Quan, Aojie ; Wang, Chen ; Zhang, Hemin et al. / A Miniature Spot Position Detector Based on a Resonant Calorimeter for the Micro-Sized Spot. IEEE 37th International Conference on Micro Electro Mechanical Systems, MEMS 2024. Institute of Electrical and Electronics Engineers Inc., 2024. pp. 987-990 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

@inproceedings{0007bd8f159542c0b280d04ceca8e75e,

title = "A Miniature Spot Position Detector Based on a Resonant Calorimeter for the Micro-Sized Spot",

abstract = "In this study, we introduce an innovative method for continuously tracking the positions of small laser spots using a resonant calorimeter. The detectable heat generated by the laser spot varies with its distribution on the proposed device. We first analyze the device's sensitivity with varying structural parameters using finite element analysis (FEA) and subsequently fabricate and measure the optimized design. Our findings indicate that the resonant frequency of the calorimeter exhibits a linear relationship with the 2 μm-sized laser spot position along with the resonator beam, covering a range from 0 to 100 μm. Remarkably, we achieve an impressive spot position noise floor as low as 2 nm/√Hz, within a 95 dB dynamic range.",

keywords = "Laser spot position detection, low noise, self-oscillation, sensitivity optimization",

author = "Aojie Quan and Chen Wang and Hemin Zhang and Yangyang Guan and Chengxin Li and Chenxi Wang and Michael Kraft",

note = "Publisher Copyright: {\textcopyright} 2024 IEEE.; 37th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2024 ; Conference date: 21-01-2024 Through 25-01-2024",

year = "2024",

doi = "10.1109/MEMS58180.2024.10439469",

language = "英语",

series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

pages = "987--990",

booktitle = "IEEE 37th International Conference on Micro Electro Mechanical Systems, MEMS 2024",

}

Quan, A, Wang, C, Zhang, H, Guan, Y, Li, C, Wang, C & Kraft, M 2024, A Miniature Spot Position Detector Based on a Resonant Calorimeter for the Micro-Sized Spot. in IEEE 37th International Conference on Micro Electro Mechanical Systems, MEMS 2024. Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Institute of Electrical and Electronics Engineers Inc., pp. 987-990, 37th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2024, Austin, United States, 21/01/24. https://doi.org/10.1109/MEMS58180.2024.10439469

A Miniature Spot Position Detector Based on a Resonant Calorimeter for the Micro-Sized Spot. / Quan, Aojie; Wang, Chen; Zhang, Hemin et al.
IEEE 37th International Conference on Micro Electro Mechanical Systems, MEMS 2024. Institute of Electrical and Electronics Engineers Inc., 2024. p. 987-990 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - A Miniature Spot Position Detector Based on a Resonant Calorimeter for the Micro-Sized Spot

AU - Quan, Aojie

AU - Wang, Chen

AU - Zhang, Hemin

AU - Guan, Yangyang

AU - Li, Chengxin

AU - Wang, Chenxi

AU - Kraft, Michael

PY - 2024

Y1 - 2024

N2 - In this study, we introduce an innovative method for continuously tracking the positions of small laser spots using a resonant calorimeter. The detectable heat generated by the laser spot varies with its distribution on the proposed device. We first analyze the device's sensitivity with varying structural parameters using finite element analysis (FEA) and subsequently fabricate and measure the optimized design. Our findings indicate that the resonant frequency of the calorimeter exhibits a linear relationship with the 2 μm-sized laser spot position along with the resonator beam, covering a range from 0 to 100 μm. Remarkably, we achieve an impressive spot position noise floor as low as 2 nm/√Hz, within a 95 dB dynamic range.

AB - In this study, we introduce an innovative method for continuously tracking the positions of small laser spots using a resonant calorimeter. The detectable heat generated by the laser spot varies with its distribution on the proposed device. We first analyze the device's sensitivity with varying structural parameters using finite element analysis (FEA) and subsequently fabricate and measure the optimized design. Our findings indicate that the resonant frequency of the calorimeter exhibits a linear relationship with the 2 μm-sized laser spot position along with the resonator beam, covering a range from 0 to 100 μm. Remarkably, we achieve an impressive spot position noise floor as low as 2 nm/√Hz, within a 95 dB dynamic range.

KW - Laser spot position detection

KW - low noise

KW - self-oscillation

KW - sensitivity optimization

UR - https://www.scopus.com/pages/publications/85186658848

U2 - 10.1109/MEMS58180.2024.10439469

DO - 10.1109/MEMS58180.2024.10439469

M3 - 会议稿件

AN - SCOPUS:85186658848

T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

SP - 987

EP - 990

BT - IEEE 37th International Conference on Micro Electro Mechanical Systems, MEMS 2024

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 37th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2024

Y2 - 21 January 2024 through 25 January 2024

ER -

Quan A, Wang C, Zhang H, Guan Y, Li C, Wang C et al. A Miniature Spot Position Detector Based on a Resonant Calorimeter for the Micro-Sized Spot. In IEEE 37th International Conference on Micro Electro Mechanical Systems, MEMS 2024. Institute of Electrical and Electronics Engineers Inc. 2024. p. 987-990. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). doi: 10.1109/MEMS58180.2024.10439469

A Miniature Spot Position Detector Based on a Resonant Calorimeter for the Micro-Sized Spot

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