A Micro Resonant DC Electric Field Sensor Based on Mode Localization Phenomenon

Zimu Yan, Jiaju Liang, Yongcun Hao, Honglong Chang

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

12 Scopus citations

Abstract

This paper for the first time reports a resonant DC electric field sensor (EFS) based on the mode localization phenomenon. The sensor uses a 3-degrees-of-freedom (DoF) weakly coupled resonator (WCR) as the mechanical sensing element, with comb capacitors on both sides for converting electric field to stiffness perturbation. The perturbation causes a drastic change in the mode shape owing to the mode localization phenomenon. Then we use the amplitude ratio (AR) instead of the frequency as the readout metric, and the sensitivity based on the AR is 1720 times higher than that based on the frequency. Just under the open-loop test, the resolution of the sensor reaches 20.4V/m√ Hz in the range of 7 kV.

Original languageEnglish
Title of host publication2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems, MEMS 2019
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages849-852
Number of pages4
ISBN (Electronic)9781728116105
DOIs
StatePublished - Jan 2019
Event32nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2019 - Seoul, Korea, Republic of
Duration: 27 Jan 201931 Jan 2019

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Volume2019-January
ISSN (Print)1084-6999

Conference

Conference32nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2019
Country/TerritoryKorea, Republic of
CitySeoul
Period27/01/1931/01/19

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