A Micro Resonant DC Electric Field Sensor Based on Mode Localization Phenomenon

Zimu Yan; Jiaju Liang; Yongcun Hao; Honglong Chang

doi:10.1109/MEMSYS.2019.8870880

A Micro Resonant DC Electric Field Sensor Based on Mode Localization Phenomenon

Zimu Yan, Jiaju Liang, Yongcun Hao, Honglong Chang

School of Mechanical Engineering

Northwestern Polytechnical University Xian

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

13 Scopus citations

Abstract

This paper for the first time reports a resonant DC electric field sensor (EFS) based on the mode localization phenomenon. The sensor uses a 3-degrees-of-freedom (DoF) weakly coupled resonator (WCR) as the mechanical sensing element, with comb capacitors on both sides for converting electric field to stiffness perturbation. The perturbation causes a drastic change in the mode shape owing to the mode localization phenomenon. Then we use the amplitude ratio (AR) instead of the frequency as the readout metric, and the sensitivity based on the AR is 1720 times higher than that based on the frequency. Just under the open-loop test, the resolution of the sensor reaches 20.4V/m√ Hz in the range of 7 kV.

Original language	English
Title of host publication	2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems, MEMS 2019
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	849-852
Number of pages	4
ISBN (Electronic)	9781728116105
DOIs	https://doi.org/10.1109/MEMSYS.2019.8870880
State	Published - Jan 2019
Event	32nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2019 - Seoul, Korea, Republic of Duration: 27 Jan 2019 → 31 Jan 2019

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Volume	2019-January
ISSN (Print)	1084-6999

Conference

Conference	32nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2019
Country/Territory	Korea, Republic of
City	Seoul
Period	27/01/19 → 31/01/19

Access to Document

10.1109/MEMSYS.2019.8870880

Cite this

Yan, Z., Liang, J., Hao, Y., & Chang, H. (2019). A Micro Resonant DC Electric Field Sensor Based on Mode Localization Phenomenon. In 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems, MEMS 2019 (pp. 849-852). Article 8870880 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2019-January). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMSYS.2019.8870880

Yan, Zimu ; Liang, Jiaju ; Hao, Yongcun et al. / A Micro Resonant DC Electric Field Sensor Based on Mode Localization Phenomenon. 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems, MEMS 2019. Institute of Electrical and Electronics Engineers Inc., 2019. pp. 849-852 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

@inproceedings{e6fe763f93404a24bdc2cf4fd88037ec,

title = "A Micro Resonant DC Electric Field Sensor Based on Mode Localization Phenomenon",

abstract = "This paper for the first time reports a resonant DC electric field sensor (EFS) based on the mode localization phenomenon. The sensor uses a 3-degrees-of-freedom (DoF) weakly coupled resonator (WCR) as the mechanical sensing element, with comb capacitors on both sides for converting electric field to stiffness perturbation. The perturbation causes a drastic change in the mode shape owing to the mode localization phenomenon. Then we use the amplitude ratio (AR) instead of the frequency as the readout metric, and the sensitivity based on the AR is 1720 times higher than that based on the frequency. Just under the open-loop test, the resolution of the sensor reaches 20.4V/m√ Hz in the range of 7 kV.",

author = "Zimu Yan and Jiaju Liang and Yongcun Hao and Honglong Chang",

note = "Publisher Copyright: {\textcopyright} 2019 IEEE.; 32nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2019 ; Conference date: 27-01-2019 Through 31-01-2019",

year = "2019",

month = jan,

doi = "10.1109/MEMSYS.2019.8870880",

language = "英语",

series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

pages = "849--852",

booktitle = "2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems, MEMS 2019",

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Yan, Z, Liang, J, Hao, Y & Chang, H 2019, A Micro Resonant DC Electric Field Sensor Based on Mode Localization Phenomenon. in 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems, MEMS 2019., 8870880, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), vol. 2019-January, Institute of Electrical and Electronics Engineers Inc., pp. 849-852, 32nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2019, Seoul, Korea, Republic of, 27/01/19. https://doi.org/10.1109/MEMSYS.2019.8870880

A Micro Resonant DC Electric Field Sensor Based on Mode Localization Phenomenon. / Yan, Zimu; Liang, Jiaju; Hao, Yongcun et al.
2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems, MEMS 2019. Institute of Electrical and Electronics Engineers Inc., 2019. p. 849-852 8870880 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2019-January).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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N2 - This paper for the first time reports a resonant DC electric field sensor (EFS) based on the mode localization phenomenon. The sensor uses a 3-degrees-of-freedom (DoF) weakly coupled resonator (WCR) as the mechanical sensing element, with comb capacitors on both sides for converting electric field to stiffness perturbation. The perturbation causes a drastic change in the mode shape owing to the mode localization phenomenon. Then we use the amplitude ratio (AR) instead of the frequency as the readout metric, and the sensitivity based on the AR is 1720 times higher than that based on the frequency. Just under the open-loop test, the resolution of the sensor reaches 20.4V/m√ Hz in the range of 7 kV.

AB - This paper for the first time reports a resonant DC electric field sensor (EFS) based on the mode localization phenomenon. The sensor uses a 3-degrees-of-freedom (DoF) weakly coupled resonator (WCR) as the mechanical sensing element, with comb capacitors on both sides for converting electric field to stiffness perturbation. The perturbation causes a drastic change in the mode shape owing to the mode localization phenomenon. Then we use the amplitude ratio (AR) instead of the frequency as the readout metric, and the sensitivity based on the AR is 1720 times higher than that based on the frequency. Just under the open-loop test, the resolution of the sensor reaches 20.4V/m√ Hz in the range of 7 kV.

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Yan Z, Liang J, Hao Y, Chang H. A Micro Resonant DC Electric Field Sensor Based on Mode Localization Phenomenon. In 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems, MEMS 2019. Institute of Electrical and Electronics Engineers Inc. 2019. p. 849-852. 8870880. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). doi: 10.1109/MEMSYS.2019.8870880

A Micro Resonant DC Electric Field Sensor Based on Mode Localization Phenomenon

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