@inproceedings{2c817f44f2e247afbca6cb97970f6e06,
title = "A High-Resolution Mass Sensor Based on Two Thermal Piezoresistive Self-Sustained Resonators Coupled via An Arching Membrane",
abstract = "This paper reports a mode-localized mass sensor based on two thermal-piezoresistive self-sustained resonators coupled by an arching mechanical membrane coupler. Sensitivities of the mass sensors based on coupled resonators with amplitude ratio readout depends on a low coupling factor. To lower the coupling stiffness between the two thermal-piezoresistive coupling resonators, an arching membrane coupler with thickness between 1 m to 8 m was fabricated underneath the coupling area of the two resonators, based on the aspect ratio dependent etching (ARDE) effect. The experimental results indicated that the sensitivity and resolution of the newly designed mass sensor with the arching membrane coupler were increased by 20 and 10 times, respectively, compared to the state-of-the-art.",
keywords = "aspect ratio dependent etching effect, Mass sensor, mode localization, self-oscillation, thermal-piezoresistive",
author = "Aojie Quan and Hemin Zhang and Chen Wang and Burssens, \{Jan Willem\} and Linlin Wang and Chenxi Wang and Cooman, \{Michel De\} and Michael Kraft",
note = "Publisher Copyright: {\textcopyright} 2022 IEEE.; 35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022 ; Conference date: 09-01-2022 Through 13-01-2022",
year = "2022",
doi = "10.1109/MEMS51670.2022.9699769",
language = "英语",
series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "856--859",
booktitle = "35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022",
}