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3D Cone-Shape Carbon Electrode Array for High-Fidelity Ecog Acquisition

  • Xuanqi Wang
  • , Xiaoli You
  • , Yong Yang
  • , Shouyan Li
  • , Yu Zhang
  • , Quetao Yu
  • , Chenfei Cao
  • , Feng Yue
  • , Honglong Chang
  • , Bowen Ji
  • Northwestern Polytechnical University Xian
  • Hainan University

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

This work presents a three-dimensional cone-shaped carbon neural electrode array that achieves non-invasive, self-adaptive contact with the cortical surface. Using the ultraviolet laser processing, 3D conical microelectrodes and interconnects are patterned directly on a soft PDMS substrate, forming a conformal, mechanically compliant interface that enhances electrocorticography (ECoG) quality. The precise control of laser parameters enables tuning of cone height, thereby modulating cathodic charge storage capacity and impedance by multiple folds. To assess in vivo performance, 2D and 3D electrodes were implanted in the contralateral primary motor cortex (M1) of a rabbit and recorded simultaneously using a dual-array acquisition system. The 16-ch 3D electrodes exhibited impedance up to two orders of magnitude lower than that of 2D electrodes, together with higher amplitudes and reduced inter-trial variability. This soft 3D carbon electrode array provides a tissue-matched neural interface for robust, high-fidelity ECoG acquisition.

Original languageEnglish
Title of host publication2026 IEEE 39th International Conference on Micro Electro Mechanical Systems, MEMS 2026
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages219-222
Number of pages4
ISBN (Electronic)9798331572518
DOIs
StatePublished - 2026
Event39th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2026 - Salzburg, Austria
Duration: 25 Jan 202629 Jan 2026

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)1084-6999

Conference

Conference39th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2026
Country/TerritoryAustria
CitySalzburg
Period25/01/2629/01/26

Keywords

  • 3D cone shape
  • Carbon electrode array
  • ECoG acquisition
  • Laser microfabrication
  • Tissue-matched interface

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